Process for producing a vibration angular-velocity sensor

Details Process for producing a vibration angular-velocity sensor Process for producing a vibration angular-velocity sensor

1995-07-20

1998-09-08

Hall, Carl E.

Metal working

Piezoelectric device making

H04R 1700

Patent

active

058026843

ABSTRACT:
A vibrator is formed on a silicon substrate to become a base by the silicon-processing procedure and a thin film of a piezoelectric material is formed on the substrate by a method matching with the silicon-processing procedure. When an ac field of a frequency near the resonance frequency of the transverse vibration of the vibrator is applied to the thin film of the piezoelectric material, the piezoelectric reverse effect excites characteristic vibration in the vibrator. If a rotational motion is generated along the axis of the beam in that state, the Coriolis' force is generated in a direction perpendicular to both the axial direction and the vibration direction of the beam. This force deforms the beam in that direction. Detecting inductive charges produced in another piezoelectric thin film fixed on the vibrator because of the piezoelectric normal effect due to the deformation, the rotational, angular velocity can be obtained.

REFERENCES:
patent: 4836023 (1989-06-01), Oikawa
patent: 5028455 (1991-07-01), Miller et al.
patent: 5430344 (1995-07-01), Takeuchi et al.
patent: 5600065 (1997-02-01), Kar et al.

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