Image analysis – Histogram processing – For setting a threshold
Patent
1992-10-14
1994-04-26
Boudreau, Leo H.
Image analysis
Histogram processing
For setting a threshold
382 34, 382 14, 395118, G06K 960
Patent
active
053074211
ABSTRACT:
The process consists of producing a first binary image (104) from descriptive data of an integrated circuit (or another type of object) to be inspected, the data being stored in a data base (102). Real images of characteristic elements of the integrated circuit to be inspected are then acquired (200) and processed so as to be applicable (300) to the binary image, as a function of their associated positions. A this obtained synthesis image is considered as a reference image with which are compared the images of the circuits to be inspected. This process is applicable to numerous types of industrially produced objects requiring a very precise inspection.
REFERENCES:
patent: 4783826 (1988-11-01), Koso
patent: 4805123 (1989-02-01), Specht et al.
patent: 4893346 (1990-01-01), Bishop
patent: 4926489 (1990-05-01), Danielson et al.
patent: 4962541 (1990-10-01), Doi et al.
patent: 5125040 (1992-06-01), Matsui et al.
S. Takeuchi et al., "Advanced 5x Reticle Inspection Technologies for ULSI Devices", pp. 195-204, 1990, Integrated Circuit Metrology, Inspection, and Process Control IV, SPIE vol. 1261.
Darboux Michel
Lionti Rosolino
Boudreau Leo H.
Commissariat a l''Energie Atomique
Prikockis Larry J.
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