Process for producing a surface acoustic wave device

Details Process for producing a surface acoustic wave device Process for producing a surface acoustic wave device

1996-07-08

1998-07-07

Hall, Carl E.

Metal working

Piezoelectric device making

H04R 1700

Patent

active

057749620

ABSTRACT:
This invention relates to a surface acoustic wave device and a production process thereof. An electrode is formed by alternately laminating a film of an aluminum alloy containing at least copper added thereto and a copper film on a piezoelectric substrate. While the particle size of the multi-layered electrode materials is kept small, the occurrence of voids in the film is prevented and life time of the surface acoustic wave device is elongated.

REFERENCES:
patent: 4017890 (1977-04-01), Howard et al.
patent: 4445066 (1984-04-01), Nishiyama et al.
patent: 5071714 (1991-12-01), Rodbell et al.
patent: 5144185 (1992-09-01), Yuhara et al.
patent: 5171642 (1992-12-01), DeHaven et al.

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