Process for producing a self-aligned grid field-effect transisto

Metal working – Method of mechanical manufacture – Assembling or joining

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29578, 29591, H01L 2128

Patent

active

043263305

ABSTRACT:
A process allowing the position and the dimensions of the grid of a field-effect transistor as well as the gaps between source and grid, grid and drain to be fixed as early as the first masking operation. To this end, a mask is formed comprising source, grid and drain windows by using a first insulating or semi-insulating material then the three windows are filled by means of a second material. The ohmic source and drain contacts are deposited in the corresponding windows reopened by selective etching of the second material effected after masking the first part of the layer situated above the non-reopened window. Second selective etching after masking of the contacts allows a Schottky-type grid contact to be deposited.

REFERENCES:
patent: 3858304 (1975-01-01), Leedy et al.
patent: 3912546 (1975-10-01), Hunsperger et al.
patent: 3994758 (1976-11-01), Ogawa et al.
patent: 4004341 (1977-01-01), Tung
patent: 4040168 (1977-08-01), Huang
patent: 4111725 (1978-09-01), Cho et al.
patent: 4173063 (1979-11-01), Kniepkamp
patent: 4193182 (1980-03-01), Lee
patent: 4213840 (1980-07-01), Omori et al.
patent: 4222164 (1980-09-01), Trieborasser
patent: 4226333 (1981-05-01), Reichert

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