Process for producing a resonator in a semiconductor laser devic

Details Process for producing a resonator in a semiconductor laser devic Process for producing a resonator in a semiconductor laser devic

1995-12-22

1998-10-20

Kelly, C. H.

Coherent light generators

Particular beam control device

Nonlinear device

372 94, H01S 310, H01S 3083

Patent

active

058257896

ABSTRACT:
A method for forming a resonator in a semiconductor laser device comprises the steps of; filling with a resin a gap surrounding the side surfaces of the waveguide for a resonator other than the end-surface to be polished; polishing the end-surface and the resin surrounding it; forming a predetermined optical coating on the polished end-surface and the resin in the state of the laser waveguide and the electrode being embedded; and removing the embedding resin. Both the bending of polished end-surfaces and the entering of the thin film into the side surface of the laser waveguide is prevented so that a high smooth end-surface of mirror coating for resonator is achieved. Furthermore, any crystals are used for a substrate carrying a semiconductor laser structure with a resonator even if that crystal is of non-cleavage, according to that method.

REFERENCES:
patent: 4592043 (1986-05-01), Williams
patent: 5377285 (1994-12-01), Podgorski
patent: 5545359 (1996-08-01), Ackley et al.
patent: 5566251 (1996-10-01), Hall et al.

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