Process for producing a probe-driving mechanism

Details Process for producing a probe-driving mechanism Process for producing a probe-driving mechanism

1996-05-08

1999-10-19

Hughes, S. Thomas

Metal working

Piezoelectric device making

310328, 310332, H01L 4122

Patent

active

059667877

ABSTRACT:
A process for producing a probe-driving mechanism. A laminate of a first and second insulating layer is placed on a support. Electrode layers and piezoelectric layers are successively laminated on the second insulating layer. Part of the support and second insulating layer is removed to form a cantilever.

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