Process for producing a photoelectric conversion device that...

Details Process for producing a photoelectric conversion device that... Process for producing a photoelectric conversion device that...

2007-03-27

2007-03-27

Lebentritt, Michael (Department: 2812)

Semiconductor device manufacturing: process

Gettering of substrate

C257SE21318

Reexamination Certificate

active

10733352

ABSTRACT:
A catalyst element remaining in a first semiconductor film subjected to a first heat treatment (crystallization) is moved and concentrated/collected by subjecting a second semiconductor film which is formed on the first semiconductor film and contains a rare gas element to a second heat treatment. That is, the rare gas element is incorporated into the second semiconductor film to generate a strain field as a gettering site.

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