Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Liquid phase epitaxial growth
Patent
1995-06-07
1997-07-22
Garrett, Felisa
Single-crystal, oriented-crystal, and epitaxy growth processes;
Processes of growth from liquid or supercritical state
Liquid phase epitaxial growth
117 56, 117 64, 117948, 4231795, C30B 1902
Patent
active
056500068
ABSTRACT:
A film made of lithium niobate-lithium tantalate solid solution may be formed on a single crystal substrate having a composition of LiNb.sub.1-z Ta.sub.z O.sub.3 (0.ltoreq.z<0.8) by the liquid phase epitaxial process. The substrate is contacted with supercooled liquid phase of a melt to produce the film thereon. The melt consists mainly of Li.sub.2 O.sub.3, Nb.sub.2 O.sub.5, Ta.sub.2 O.sub.5 and a flux. A composition of the liquid phase is within a region encompassed by a straight line K linking a point A (95, 5, 0) and a point B (95, 2, 3), a straight line G linking the point A (95, 5, 0) and a point C (60, 40, 0), a straight line H linking the point C (60, 40, 0) and a point D (60, 0, 40), a straight line J linking the point B (95, 2, 3) and a point E (0, 40, 60) and a curved line I defining a composition whose saturation temperature is not more than 1200.degree. C. Each line is shown in a triangular diagram of a pseudo-ternary system of LiNbO.sub.3 -LiTaO.sub.3 --a melting medium. The composition of the solid solution may preferably be LiNb.sub.1-x Ta.sub.x O.sub.3 (0.ltoreq.x<0.8, z<x).
REFERENCES:
patent: 3998687 (1976-12-01), Ballman et al.
patent: 4073675 (1978-02-01), Ballman et al.
patent: 5209917 (1993-05-01), Ohno et al.
Kondo et al., "LPE Growth of Li(Nb,Ta)O3 Solid-Solution Thin Film Waveguides on LiTaO3 Substrates" 1979, pp. 314-322.
Miyazawa et al., "Optical Waveguide of LiNbO3 Thin Film Grown by Liquid Phase Epitaxy" 1975, pp. 8-10.
Fukuda et al., "LiNbO3 and LiTaO3 Growth by the Capillary Liquid Epitaxial Technique" 1980, pp. 291-298.
Journal of Crystal Growth, vol. 46, 1979, Amsterdam NL, pp. 314-322, XP002022268 Kondo: "LPE Growth of Li(nb,Ta)O3 solid-solution think film waveguides on LiTaO3 substrates".
Journal of Crystal Growth, vol. 132, No. 1/2, 1 Sep. 1993, Amsterdam NL, pp. 48-60, XPOOO474741 Yamada: "Liquid phase epitaxial growth of LiNbO3 thin film".
Fukuda Tsuguo
Imaeda Minoru
Kawaguchi Tatsuo
Garrett Felisa
NGK Insulators Ltd.
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