Process for producing a large area solid state radiation detecto

Details Process for producing a large area solid state radiation detecto Process for producing a large area solid state radiation detecto

1992-02-20

1993-10-19

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 4, 437 51, 437208, 250270, H01L 3118

Patent

active

052544800

ABSTRACT:
A process for producing an array of solid state radiation detectors includes depositing on a substrate one or more layers of silicon-based materials and then depositing a metal layer overlying silicon-based substance. The metal layer is formed into an array of metal layer regions, and then the metal layer is used as a mask to remove exposed adjacent silicon-based substance layers thereby forming an array of silicon-based substance layers that are aligned with the array of metal layers for forming an array of photosensitive sensing devices. The process of the present invention reduces the number of microlithography steps that are used in forming an array of layered amorphous silicon photosensitive devices.

REFERENCES:
patent: 3825763 (1974-07-01), Ligtenberg et al.
patent: 4069355 (1978-01-01), Lubowski et al.
patent: 4226898 (1980-10-01), Ovshinsky et al.
patent: 4511799 (1985-04-01), Bjorkholm
patent: 4543490 (1985-09-01), Gupta
patent: 4608749 (1986-09-01), Harada
patent: 4672454 (1987-06-01), Cannella et al.
patent: 4675739 (1987-06-01), Catchpole et al.
patent: 4689487 (1987-08-01), Nishiki et al.
patent: 4735908 (1988-04-01), Higashi et al.
patent: 4769338 (1988-09-01), Ovshinsky et al.
patent: 4788582 (1988-11-01), Yamamoto et al.
patent: 4799094 (1989-01-01), Rougest
patent: 4810881 (1989-03-01), Berger et al.
patent: 4859617 (1989-08-01), Nomoto et al.
patent: 4866003 (1989-09-01), Yokoi et al.
patent: 4883766 (1989-11-01), Ishida et al.
patent: 4940901 (1990-07-01), Henry et al.
patent: 4943837 (1990-07-01), Konishi et al.
patent: 4954706 (1990-09-01), Takahashi et al.
patent: 4980553 (1990-12-01), Henry
patent: 4982095 (1991-01-01), Takahashi et al.
patent: 5079426 (1992-01-01), Antonuk et al.
patent: 5132541 (1992-07-01), Conrads et al.
patent: 5187369 (1993-02-01), Kingsley et al.
"Digital Slot Radiography Based on a Linear X-Ray Image Intensifier and Two-Dimensional Image Sensors," Beerlage, Levels and Mulder, SPIE vol. 626 Medicine, XIV/PACS IV 161-169 (1986).
"Multi-Element Self-Scanned Mosaic Sensors," Weimer et al, IEEE Spectrum, Mar. 1969, pp. 52-65.
"Principles of CMOS VLSI Design," Neil Weste, and Kamran Eshraghian, Addison-Wesley Publishing Co., p. 156.

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