Process for preparing superconducting films by radio-frequency-g

Superconductor technology: apparatus – material – process – High temperature – per se – Having tc greater than or equal to 150 k

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Details

505730, 505737, 505742, 427 34, 427 62, 427226, 427314, 427377, 427421, 427 451, H01L 3912, B05D 304, B05D 302, C23C 410

Patent

active

051008688

ABSTRACT:
A two-step process for the preparation of a thallium-containing superconductive film is described.
In the first step of this process, an aerosol mist containing reactants necessary to produce a calcium/barium/strontium/copper precursor material is provided. This mist is subjected to radio-frequency radiation while in the plasma region, and it thereafter is deposited onto an electrically grounded substrate.
In the second step of the process, the coated substrate is contacted with thallium-containing vapor.

REFERENCES:
patent: 5032568 (1991-07-01), Lau et al.

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