Process for preparing superconducting films by radio-frequency g

Details Process for preparing superconducting films by radio-frequency g Process for preparing superconducting films by radio-frequency g

1990-05-24

1992-10-20

Beck, Shrive

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

505737, 427453, 427 62, 427226, 427565, H01L 3912, B05D 512, C23C 1640, C23C 1650

Patent

active

051570157

ABSTRACT:
A process for coating a superconductive film onto a substrate is provided. In the first step of this process, a solution of the reagents required to produce the superconductive material is subjected to ultrasonic sound waves to create an aerosol. Thereafter, the aerosol is contacted with plasma while being subjected to substantially atmospheric pressure and a radio frequency alternating current in excess of 100 kilohertz; a vapor is produced in this step. The vapor so produced is passed through an orifice and allowed to deposit onto a substrate, which is in contact with a substrate holder which is electrically grounded.

REFERENCES:
patent: 4717584 (1988-01-01), Aoki et al.
patent: 5032568 (1991-07-01), Lau et al.
Nobumasa et al., Jap. J. of Applied Phys. Lett., vol. 27, No. 9 Sep. 1988, pp. L1669-L1671 Merriam-Webster Dictionary, .COPYRGT. 1986, p. 971.
Kirkland et al., Advanced Ceramic Materials, vol. 2, No. 3B (Special Issue), Jul., 1987, pp. 401-410.
Koukitu et al., Jap. J. of App. Phys. Lett., vol. 28, No. 7, Jul. 1989, pp. L1212-L1213.
Elam et al., Advanced Ceramic Materials, vol. 2, No. 3B (Special Issue), Jul., 1987, pp. 411-421.
Bunshah et al., Deposition Technologies for Films & Coatings (Noyes Publications, Park Ridge, N.J.), .COPYRGT. 1982, p. 365.

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