Process for preparing silicon nitride, silicon carbide or fine p

Details Process for preparing silicon nitride, silicon carbide or fine p Process for preparing silicon nitride, silicon carbide or fine p

1985-05-02

1986-09-23

Rosenberg, Peter D.

Chemistry of inorganic compounds

Silicon or compound thereof

Binary compound

C01B 3306

Patent

active

046134905

ABSTRACT:
Fine silicon nitride powders, fine silicon carbide powders, or fine powdery mixture of silicon nitride and silicon carbide are prepared by vapor phase reaction of an aminosilane compound, a cyanosilane compound, a silazane compound, an alkoxysilane compound or a siloxane compound and heat treatment of the resulting fine powders in a non-oxidizing gas atmosphere.

REFERENCES:
patent: Re31447 (1983-11-01), Baney
patent: 3565674 (1971-02-01), Boland
patent: 4036653 (1977-07-01), Jacobson
patent: 4073845 (1978-02-01), Buljan et al.
patent: 4122155 (1978-10-01), Prochazka et al.
patent: 4298558 (1981-11-01), Baney
patent: 4314956 (1982-02-01), Baney
patent: 4405489 (1983-09-01), Iwai et al.

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