Chemistry of inorganic compounds – Silicon or compound thereof – Binary compound
Patent
1992-07-17
1994-06-07
Klemanski, Helene
Chemistry of inorganic compounds
Silicon or compound thereof
Binary compound
301 88, C04B 3554
Patent
active
053187610
ABSTRACT:
A process for the preparation of a beta-silicon carbide powder of high purity which is suitable for use in the manufacture of semiconductor equipment and which has a content of 1 ppm or less of each atom harmful to the manufacture of semiconductor devices. The process comprises preparing a carbon- and silicon-containing starting mixture comprising (a) at least one siliceous material selected from liquid silicon compounds and solid siliceous substances derived from a hydrolyzable silicon compound, and (b) at least one carbonaceous material selected from polymerizable or cross-linkable organic compounds prepared in the presence of a catalyst which is substantially free from atoms harmful to the manufacture of semiconductor devices. The starting mixture comprises at least one liquid substance used as component (a) or (b). The starting mixture is then solidified by heating and/or by use of a catalyst or a curing agent. The resulting solid body is optionally heat treated in a non-oxidizing atmosphere at a temperature in the range of from 500.degree. C. to 1300.degree. C. for a period sufficient to remove volatiles. The cured and optionally heat-treated body is calcined in a non-oxidizing atmosphere under conditions sufficient to give beta-silicon carbide powder.
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Kano Haruyuki
Kojima Shoichi
Kurachi Tasuo
Minagawa Kazuhiro
Saito Tasuku
Bridgestone Corporation
Klemanski Helene
Sumitomo Metal Industries Ltd.
Wright A.
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