Process for preparing sic protective films on metallic or metal

Details Process for preparing sic protective films on metallic or metal Process for preparing sic protective films on metallic or metal

1987-11-10

1989-09-26

Morgenstern, Norman

Coating processes

Coating by vapor, gas, or smoke

Carbon or carbide coating

4272551, 4272552, 4272554, 4272557, 4272481, C23C 1624

Patent

active

048699292

ABSTRACT:
Silicon carbide protective films are produced on the surface of metallic or metal-impregnated substrates. A silicide or silicon diffusion coating is initially formed on the surface of the substrate, and subsequently said surface is treated with a gas stream which is reducing to the coating and substrate and contains a gaseous carbon source at a temperature greater than 500.degree. C.

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patent: 3902930 (1975-09-01), Sata et al.
patent: 4555275 (1985-11-01), Tobin
patent: 4634605 (1987-01-01), Wiesmann
patent: 4696834 (1987-09-01), Varaprath
patent: 4714632 (1987-12-01), Cabrera et al.
H. C. Hinterman, "Tribological and Protective Coatings by Chemical Vapor Deposition", Thin Solid Films, 84 (1981), 215-243.
F. Bozso et al., "Studies of SIC Formation on Si(100) by Chemical Vapor Deposition", of Appl. Phys. 57(8), p. 2771 (1985).
S. Verspuri, "CVD of Silicon Carbide and Silicon Nitride on Tools for Electrochemical Machine", Proc. Electrochem. Soc. (1979), vol. 79-3.

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