Process for preparing semiconductor layer

Details Process for preparing semiconductor layer Process for preparing semiconductor layer

1984-09-21

1989-09-26

Pianalto, Bernard D.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

437170, 437172, 437225, B05D 306

Patent

active

048699764

ABSTRACT:
An improved process for preparing a semiconductor layer by means of high frequency glow discharge generated between a ground electrode and a RF electrode, the improvement which comprises controlling a DC potential difference between the electrodes at a voltage of not more than 10 V. According to the process, the semiconductor layer formed on the RF electrode side is satisfactory in electrical and electronical properties, and can be practically used.

REFERENCES:
patent: 4333814 (1982-06-01), Kuyel
patent: 4361595 (1982-11-01), Kaganowicz et al.
patent: 4466380 (1984-08-01), Jansen et al.
patent: 4481230 (1984-11-01), Hanak

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