Process for preparing semiconductor device

Fishing – trapping – and vermin destroying

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437101, 437247, 437909, 148DIG1, 148DIG11, H01L 21265

Patent

active

052197670

ABSTRACT:
Disclosed is a process for preparing a semiconductor device which comprises a step of growing, in a molecular beam epitaxial growth apparatus, a P-type silicon epitaxial layer which becomes the base, on an N-type silicon epitaxial layer which becomes the collector; a step of growing, in a molecular beam epitaxial growth apparatus, an antimony doped N-type silicon amorphous layer which becomes the emitter, on said P-type silicon epitaxial layer; and a step of converting the above N-type silicon amorphous layer to an N-type silicon epitaxial layer by the solid phase epitaxy method according to the annealing heat treatment.

REFERENCES:
patent: 4563807 (1986-01-01), Sakai et al.
patent: 4853342 (1989-08-01), Taka et al.
patent: 4968635 (1990-11-01), Hamaraki

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