Process for preparing radiation sensitive compound and positive

Details Process for preparing radiation sensitive compound and positive Process for preparing radiation sensitive compound and positive

1992-04-17

1994-02-01

Lee, Mary C.

Organic compounds -- part of the class 532-570 series

Organic compounds

Diazooxide or diazotate

430165, 430191, 430192, 430193, C07C30328, G03F 7022

Patent

active

052833240

ABSTRACT:
A radiation sensitive compound prepared by reacting a phenol compound with a quinone diazide sulfonyl halide in a mixture of a solvent having a relative dielectric constant of not larger than 10 and a solvent having a relative dielectric constant of at least 15, which compound is less colored and gives a positive resist composition having a good resolution.

REFERENCES:
patent: 3050389 (1962-08-01), Sus et al.
patent: 3102809 (1963-09-01), Endermann et al.
patent: 4719167 (1988-01-01), Miura et al.
patent: 4992596 (1991-02-01), Jefferies, III et al.
patent: 5019478 (1991-05-01), Toukhy et al.
patent: 5080997 (1992-01-01), Hioki et al.

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