Process for preparing polysilicon with diminished hydrogen conte

Details Process for preparing polysilicon with diminished hydrogen conte Process for preparing polysilicon with diminished hydrogen conte

1993-04-26

1994-07-05

Kunemund, Robert

Chemistry of inorganic compounds

Silicon or compound thereof

Elemental silicon

427213, C01B 3302

Patent

active

053265475

ABSTRACT:
The hydrogen content of polysilicon can be reduced by heat treatment. The process is preferably conducted on polysilicon particles in bead-like form produced by chemical vapor deposition in a fluidized bed. The heat treatment is preferably conducted at a temperature of 1020.degree.-1200.degree. C. for a time from about 6 hours to about 1 hour sufficient to reduce the hydrogen content, and insufficient to cause agglomeration of the particles being treated. In order to reduce the tendency of particles to agglomerate at the process temperature employed, the particle bed is preferably maintained in motion during the dehydrogenation. The products produced by the process can have a hydrogen content of 30 ppma or less. These improved products can be used to produce monocrystalline silicon for the production of semiconductor devices.

REFERENCES:
patent: 3012862 (1961-12-01), Bertrand et al.
patent: 4237150 (1980-12-01), Wiesmann
patent: 4237151 (1980-12-01), Strongin et al.
patent: 4424199 (1984-01-01), Iya
patent: 4537759 (1985-08-01), Walker et al.
patent: 4642227 (1987-02-01), Flagan et al.
patent: 4676968 (1987-06-01), Sanjurjo et al.
patent: 4684513 (1987-08-01), Iya
patent: 4784840 (1988-11-01), Gautreaux et al.
patent: 4820587 (1989-04-01), Gautreaux et al.
patent: 4900411 (1990-02-01), Poong et al.
patent: 4994107 (1991-02-01), Flagan et al.
patent: 5037503 (1991-08-01), Kajimoto et al.
patent: 5139762 (1992-08-01), Flagella
Kirk-Othmer's Encyclopedia of Chemical Technology, "Fluidization", (1980), vol. 10, pp. 548-581.

Affiliated with

Also associated with

Rating

Process for preparing polysilicon with diminished hydrogen conte does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for preparing polysilicon with diminished hydrogen conte, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for preparing polysilicon with diminished hydrogen conte will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-794875