Process for preparing oxide superconducting films by radio-frequ

Details Process for preparing oxide superconducting films by radio-frequ Process for preparing oxide superconducting films by radio-frequ

1990-04-17

1992-06-09

Lusignan, Michael

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

505737, 505730, 427 62, 427 38, 427 39, 427226, 427314, 4271263, 427421, 427 57, B05D 512, B05D 306

Patent

active

051207036

ABSTRACT:
A process for coating a superconductive film onto a substrate is provided. In the first step of this process, a solution of the reagents required to produce the superconductive material is subjected to ultrasonic sound waves to create an aerosol. Thereafter, the aerosol contacted with plasma while being subjected to substantially atmospheric pressure and a radio frequency alternating current in excess of 100 kilohertz; a vapor is produced in this step. The vapor so produced is passed through an orifice and allowed to deposit onto a substrate.

REFERENCES:
patent: 4717584 (1988-01-01), Aoki et al.
patent: 5032568 (1991-07-01), Lau et al.
Terashima et al "Preparation of superconducting Y-Ba-Cu-O films by a reactive plasma evaporation method," Appl. Phys. Lett. 52(15) Apr. 1988 pp. 1274-1276.
Kirkland et al., Advanced Ceramic Materials, vol. 2, No. 3B (Special Issue), Jul. 1987, pp. 401-410.
Koukitu et al., Jap. J. of Appl. Phys. Lett., vol. 28, No. 7, Jul. 1989, pp. L1212-L1213.
Elam et al, Advanced Ceramic Materials, vol. 2, No. 3B (special Issue), Jul. 1987, pp. 411-421.
Bunshah et al, Deposition Technologies for Films and Coatings, (Noyes Pub., Park Ridge, N.J.) .COPYRGT.1982, p. 365.

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