Process for preparing layered structure including oxide super co

Details Process for preparing layered structure including oxide super co Process for preparing layered structure including oxide super co

1996-07-15

1997-10-07

King, Roy V.

Superconductor technology: apparatus, material, process

Processes of producing or treating high temperature...

Coating

505732, 4272555, 4272557, 4274193, 4271263, 427 62, C23C 1424, B05D 512

Patent

active

056748132

ABSTRACT:
The invention provides a method for preparing a layered structure made up of a plurality of thin films composed of different compositions, in which the method involves using a reactive co-evaporation technique to deposit a first thin film on a substrate using a first set of evaporation sources, and then depositing another thin film of a different composition on the first thin film, using a second set of evaporation sources that has no evaporation sources common with the first set of evaporation sources. In the method, the first thin film is deposited in a first deposition sub-chamber and the second thin film is deposited in a second deposition subchamber, both of which are part of a single vacuum chamber.

REFERENCES:
Bodin et al, Jpn. J. Appl. Phys. vol. 31, Part 2, No. 7B Jul. 1992, pp. L949-L952.
Ohara et al, Appl Phys. Lett. 58(3) Jan. 1991, pp. 298-300.
Nakao et al, Jpn. J. Appl. Phys. 30(12B) Dec. 1991, pp. 3929-3932.

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