Process for preparing laser knife

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board

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Details

1283031, 20419216, 20419222, 20419223, 20419231, C23C 1400, A61B 1736, B05D 306

Patent

active

048329797

ABSTRACT:
A process for preparing a laser knife wherein on the surface of a probe portion of a laser knife are coated with a carbon coating of 1 .mu.m to 50 .mu.m in thickness and a protective coating of 1 .mu.m to 50 .mu.m in thickness in that order by either a sputtering method or an ion plating method. The protective coating is made of sapphire, ruby or quartz glass.

REFERENCES:
patent: 4736743 (1988-04-01), Daikuzono
Vossen et al., Thim Film Processes, (Academic Press, New York), .COPYRGT.1978, pp. 131-134, 167-170.
Bunshah et al., Deposition Technologies for Films and Coatings, .COPYRGT.1983 (Noyes, Park Ridge), pp. 244-245.

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