Process for preparing fluorine-containing norbornene derivative

Details Process for preparing fluorine-containing norbornene derivative Process for preparing fluorine-containing norbornene derivative

2007-03-06

2007-03-06

Walke, Amanda (Department: 1752)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

At least one aryl ring which is part of a fused or bridged...

C525S332100, C526S280000

Reexamination Certificate

active

10753529

ABSTRACT:
There are provided a novel norbornene derivative which is a material for a chemically amplifying type photoresist for F2laser, possesses excellent transparency and improved dry etching resistivity and has a fluorine-containing ketone unit or fluorine-containing tertiary alcohol unit directly bonded to the norbornene backbone; a fluorine-containing polymer obtained by using the norbornene derivative as a copolymerizable monomer; and a chemically amplifying type photoresist composition comprising the fluorine-containing polymer, a photoacid generator and a solvent.

REFERENCES:
patent: 6468712 (2002-10-01), Fedynyshyn
patent: 6548219 (2003-04-01), Ito et al.
patent: 6858760 (2005-02-01), Komoriya et al.
patent: 6884564 (2005-04-01), Feiring et al.
patent: 2001/0038969 (2001-11-01), Hatakeyama
patent: 2002/0055061 (2002-05-01), Taylor et al.
patent: 2002/0146638 (2002-10-01), Ito et al.
patent: 2003/0232276 (2003-12-01), Poss et al.
patent: 2004/0180287 (2004-09-01), Feiring et al.
patent: 2004/0225159 (2004-11-01), Komoriya et al.
patent: 2004/0265738 (2004-12-01), Feiring et al.
patent: 157262 (1985-10-01), None
patent: 1 331 216 (2003-07-01), None
patent: 1 398 339 (2004-03-01), None
patent: 1 413 927 (2004-04-01), None
patent: 2001-296662 (2001-10-01), None
patent: WO 02/36533 (2002-05-01), None
Pirkle W.H. and Rinaldi P.L., “Use of Liquid-Crystal-Induced Circular Dichroism for Determination of Absolute Configuration of Alcohols and Oxaziridines”, J. Org. Chem., 1990, vol. 45, pp. 1379 to 1382.
Krasovsky A.L. et al., “Diels-Alder reactions of γ-trifluoroacetylvinylsufones”, Tetrahedron, Jan. 1, 2001, vol. 57, No. 1, pp. 201 to 209.
International Search Report for PCT/JP02/07.112 dated Oct. 29, 2002.
International Preliminary Examination Report to PCT/JP02/07112 dated Sep. 5, 2003 (Japanese language).

Affiliated with

Also associated with

Rating

Process for preparing fluorine-containing norbornene derivative does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for preparing fluorine-containing norbornene derivative, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for preparing fluorine-containing norbornene derivative will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3774071