Process for preparing filter

Details Process for preparing filter Process for preparing filter

1993-02-05

1996-01-09

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Screen other than for cathode-ray tube

430 20, 430321, 430328, 4302831, G03F 900

Patent

active

054828031

ABSTRACT:
A filter completely free from resin residues remaining on the glass substrate surface in the photolithographic process is prepared with a high production efficiency by applying a photosensitive resin to a substrate surface, subjecting the applied resin to light exposure and development by photolithography, and heating the resin, thereby baking the resin, where the substrate surface is irradiated with an ultraviolet ray in an oxygen-containing atmosphere, before and/or after the baking, thereby removing residues remaining on the substrate surface due to the development.

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patent: 4837098 (1989-06-01), Shimamura et al.
patent: 4917471 (1990-04-01), Takao et al.
patent: 5177627 (1993-01-01), Ishiwata et al.
patent: 5185059 (1993-02-01), Nishida et al.
patent: 5279913 (1994-01-01), Van Doorn

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