Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Screen other than for cathode-ray tube
Patent
1997-11-03
1998-11-03
McPherson, John A.
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Screen other than for cathode-ray tube
430321, 430328, G02B 520, G02F 11335
Patent
active
058306080
ABSTRACT:
A filter completely free from resin residues remaining on the glass substrate surface in the photolithographic process is prepared with a high production efficiency by applying a photosensitive resin to a substrate surface, subjecting the applied resin to light exposure and development by photolithography, and heating the resin, thereby baking the resin, where the substrate surface is irradiated with an ultraviolet ray in an oxygen-containing atmosphere, before and/or after the baking, thereby removing residues remaining on the substrate surface due to the development.
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Abstract of JP 63-298242, "Formation of Photosensitive Resin Layer," Fujita (Dec. 1988).
Ishiwata Kazuya
Yoshioka Toshifumi
Canon Kabushiki Kaisha
McPherson John A.
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