Process for preparing extraction grids

Details Process for preparing extraction grids Process for preparing extraction grids

1988-05-06

1990-02-06

Rowan, Kurt

Electric lamp or space discharge component or device manufacturi

Process

Electrode making

445 11, 445 24, H01J 0924, H01J 0900

Patent

active

048985570

ABSTRACT:
Process for producing extraction grids for ion sources. A mounting plate (1) of a thermostable material is provided on both sides with a continuous metal coating (2, 3). An essentially congruent pattern of holes is produced in the mounting plate (1) and in the metal coatings (2, 3). In such an extraction system, the metal coatings, electrically separated on either side, form extraction grids or electrodes. By disposing a core region (1a) of a conducting or semiconducting material in the mounting plate (1), a third electrode can be produced for controlling the ion beam.

REFERENCES:
patent: 2721950 (1955-10-01), Piper
patent: 2967962 (1961-01-01), Turk
patent: 3687513 (1972-08-01), Holz
patent: 3716742 (1973-02-01), Nakayama
patent: 3743879 (1973-07-01), Kupsky
patent: 3822454 (1974-01-01), Speigel
patent: 4318026 (1982-03-01), D'Amato
patent: 4534744 (1985-08-01), Kuznetzoff

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