Process for preparing electron beam resists

Details Process for preparing electron beam resists Process for preparing electron beam resists

1976-09-08

1978-02-14

Hamrock, William F.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Polymers from only ethylenic monomers or processes of...

C08F 832

Patent

active

040740315

ABSTRACT:
Positive electron beam resists are prepared by reacting a film which is a copolymer of methyl methacrylate and methacrylic acid with a tertiary amine.

REFERENCES:
patent: 3328367 (1967-06-01), Rees
patent: 3728319 (1973-04-01), Kiesel et al.

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