Process for preparing disilane by using molecular sieves

Details Process for preparing disilane by using molecular sieves Process for preparing disilane by using molecular sieves

1990-09-24

1992-02-18

Chaudhuri, Olik

Chemistry of inorganic compounds

Silicon or compound thereof

Binary compound

55 75, C01B 3304

Patent

active

050892444

ABSTRACT:
Process for preparing disilane, wherein a raw gas including monosilane, disilane, trisilane and impurities such as phosphine, hydrogen sulfide, arsine, disiloxane and higher siloxanes, undergoes a step of separation by distillation for the substantial elimination of the other compounds of silicon, except disiloxane, and the substantial elimination of phosphine, hydrogen sulfide and arsine impurities, wherein a final purification of the disilane takes place by selective adsorption on molecular sieves, in which one is a sieve of type 3 A and which is used for the elimination of the siloxanes and hydrogen sulfide and the other is a sieve of type 4 A for the elimination of phosphine and arsine.

REFERENCES:
patent: 3982912 (1976-09-01), Yatsurugi et al.
patent: 4554141 (1985-11-01), Scull et al.
patent: 4976944 (1990-12-01), Pacauro et al.
Ruthven, "Zeolites as Selective Adsorbents", Chemical Engineering Progress, Feb. 1988, pp. 42-50.
Chemical Abstracts, vol. 66, No. 8, Feb. 20, 1967, p. 3102, Abrege No. 3246w, Columbus, Ohio, U.S.A.; V. Milenko et al.: Ion-Exchange Equilibriums in Molecular Sieve 4A" & Trans. Faraday Soc. 1966, vol. 62, No. 12 pp. 3479-3488.

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