Organic compounds -- part of the class 532-570 series – Organic compounds – Diazooxide or diazotate
Patent
1997-03-07
1998-06-30
Powers, Fiona T.
Organic compounds -- part of the class 532-570 series
Organic compounds
Diazooxide or diazotate
C07D31120, C07D33506
Patent
active
057735913
ABSTRACT:
A novel process for preparing sulfonic acid esters and amides of benzo-heterocyclic diazo diketo compounds, such as substituted diazo-4-oxo-3,4-dihydrocoumarins, which are useful synthetic intermediates in a wide variety of applications including photoresists, opto-electronics, agricultural, and pharmaceutical applications is disclosed and claimed. The process comprises the steps of (a) subjecting a substituted benzo-heterocyclic .beta.-keto-enol compound to suitable diazo transfer conditions in the presence of a diazo transfer agent; (b) subjecting the so formed diazo diketo compound to suitable halosulfonation conditions in the presence of a halosulfonation agent; and (c) subjecting the so formed halosulfonyl aromatic compound to suitable substitution reaction in the presence of an alcohol or an amine to form the corresponding sulfonic acid ester or amide of benzo-heterocyclic diazo diketo compound. The compounds formed from the process of the present invention exhibit very high photosensitivity in the deep ultraviolet (DUV) region (ca. 250 nm), and therefore, are useful as photoactive compounds in DUV photoresist formulations.
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Aslam Mohammad
Kvakovszky George
Sheehan Michael T.
Hoechst Celanese Corp.
Powers Fiona T.
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