Process for preparing amorphous silicon

Details Process for preparing amorphous silicon Process for preparing amorphous silicon

1989-12-29

1991-07-23

Chaudhuri, Olik

Chemistry of inorganic compounds

Silicon or compound thereof

Elemental silicon

423348, 427255, C01B 33027

Patent

active

050342088

ABSTRACT:
Amorphous silicon powder or film can be prepared by thermally decomposing a perchloropolysilane.

REFERENCES:
patent: 3974003 (1976-08-01), Zirinsky et al.
patent: 4374182 (1983-02-01), Gaul et al.
patent: 4696834 (1987-09-01), Varaprath

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