Process for preparing a layered superconducting structure

Details Process for preparing a layered superconducting structure Process for preparing a layered superconducting structure

1995-06-01

1997-05-13

King, Roy V.

Superconductor technology: apparatus, material, process

Processes of producing or treating high temperature...

Producing josephson junction, per se

505473, 505475, 505702, 505731, 505732, 505236, 505238, 427 62, 4274193, H01L 3924, B05D 512

Patent

active

056292686

ABSTRACT:
A process for depositing successively a plurality of thin films on a bottom superconductor layer made of oxide superconductor deposited on a substrate in a single chamber under a condition, the bottom superconductor layer is heated in ultra-high vacuum at a temperature which is lower than the oxygen-trap temperature (T.sub.trap) at which oxygen enter into the oxide superconductor but higher than a temperature which is lower by 100.degree. C. than the oxygen-trap temperature (T.sub.trap -100.degree. C.) and then the first thin film is deposited thereon.

REFERENCES:
patent: 5061687 (1991-10-01), Takada et al.
patent: 5087605 (1992-02-01), Hegde et al.
Patent Abstracts of Japan, vol. 13, No. 346 (E-798) 3 Aug. 1989; & JP-A-11 06 481 (Fujitsu).
IEEE Transactions On Magnetics, vol. 27, No. 2, Mar. 1991, New York, US pp. 1361-1364, Sakuta K. et al, "Microscopic Observation of interface structures of YBaCuO/MgO/YBaCuO double-heteroepitaxial thin films by TEM" & Applied Superconductivity Conference 24 Sep. 1990, Snowmass, US.
Harris et al, Solid State Communications, vol. 67, No. 4 1988, pp. 359-362.
Sobolewski et al, "Cleaning Of YBa.sub.2 Cu.sub.3 O.sub.7-x surfaces by thermal Oxidation Treatments", AIP No. 200 (Boston, MA) 1989 pp. 197-204.
Ohara et al, "Atmospheric deterioration of clean surface of epitaxial (001)-YBaCuO Films studied by low-energy electron diffraction" Jpn. J. Appl. Phys. 30(12B) Dec. 1991, pp. L2085-2087.
Rogers et al, "Fabrication of heteroepitaxial YBa.sub.2 Cu.sub.3 O.sub.7-x --PrBa.sub.2 Cu.sub.3 O.sub.7-x --YBa.sub.2 Cu.sub.3 O.sub.7-x Josephson device grown by laser deposition", Appl. Phys. lett. 55(19) Nov. 1989 pp. 2032-2034.
Mizuno et al, "Fabrication of thin-film-type Josephson junctions using a B.sub.i --S.sub.r --C.sub.a --C.sub.u --O/B.sub.i --S.sub.r C.sub.u --O/B.sub.i --S.sub.r --C.sub.a --C.sub.u --O structure," Appl. Phys. lett. 56(15) Apr., 1990, pp. 1469-1471.
Kiryakov et al, "Investigation of the gas evolution from high-Tc superconductivity ceramic Y--B.sub.a --C.sub.u --O heat treated in vacuum", Superconductivity vol. 3, No. 6 Jun. 1990, pp. 1057-1064.

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