Process for preparation of small glass electrode

Details Process for preparation of small glass electrode Process for preparation of small glass electrode

1995-06-05

1997-08-26

Tung, T.

Etching a substrate: processes

Nongaseous phase etching of substrate

Etching inorganic substrate

65102, 1566541, 1566571, 15665911, 1566621, 204420, 204435, 216 39, 216 41, 216 99, H01L 2100, G01N 2736

Patent

active

056607415

ABSTRACT:
A small glass electrode and process for preparation thereof are disclosed. This small glass electrode is characterized in that said glass electrode, which has a bonded structure comprises a reference electrode composed of silver/silver chloride, a glass substrate having a pad embedded therein, said pad being composed of gold or platinum and circuit-connected to the reference electrode, and a silicon substrate having a (100) plane selectively etched by the anisotropic etching technique and comprising a groove for injecting an electrolyte composed of an aqueous solution containing chlorine such as KCl, or HCl, at least one hole for holding the electrolyte and a glass film formed in a portion corresponding to the reference electrode. By this structure, the small glass electrode can be easily manufactured at a low cost.

REFERENCES:
patent: 2366489 (1945-01-01), Cary et al.
patent: 3458422 (1969-07-01), Proctor
patent: 3560256 (1971-02-01), Abrams
patent: 3573948 (1971-04-01), Tarnopol
patent: 3676319 (1972-07-01), Kirsten
patent: 4282079 (1981-08-01), Chang et al.
patent: 4592824 (1986-06-01), Smith et al.
patent: 4786396 (1988-11-01), Yee et al.
patent: 4816132 (1989-03-01), Kotani et al.
patent: 4842712 (1989-06-01), Seshimoto et al.
patent: 4859505 (1989-08-01), Nakayama et al.
patent: 4863560 (1989-09-01), Hawkins
patent: 4874499 (1989-10-01), Smith et al.
patent: 4975175 (1990-12-01), Karube et al.
patent: 5160361 (1992-11-01), Murata et al.
patent: 5183550 (1993-02-01), Mattiessen
U.S. Application No. 08/153,054, Suzuki et al., filed Nov. 17, 1993 Assignee Fujitsu Limited.

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