Process for preparation of semiconductor wafer surface

Details Process for preparation of semiconductor wafer surface Process for preparation of semiconductor wafer surface

2006-01-31

2006-01-31

Lebentritt, Michael (Department: 2812)

Semiconductor device manufacturing: process

Including control responsive to sensed condition

Electrical characteristic sensed

C438S011000, C438S101000

Reexamination Certificate

active

06991943

ABSTRACT:
A method for adjusting the resistivity in the surface of a semiconductive substrate including selective measurement and counter-doping of areas on a major surface of a semiconductive substrate.

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