Process for precise processing of workpiece using free radicals

Details Process for precise processing of workpiece using free radicals Process for precise processing of workpiece using free radicals

1988-06-24

1990-10-02

Valentine, Donald R.

Chemistry: electrical and wave energy

Processes and products

Electrostatic field or electrical discharge

20412946, 20412955, 156643, 156646, B23H 702, B23H 712, B23H 738, B23H 914

Patent

active

049604953

ABSTRACT:
The invention relates to a precision process, wherein a radical reaction of a radical produced from a gas on discharge or laser beam excitation in a gaseous atmosphere with an atom or molecule constituting a workpiece is utilized, a compound produced according to the reaction is vaporized and removed, and thus a workpiece such as silicon single crystal, ceramics material or the like can be smoothed, cut, bored, grooved and so forth without leaving a residual defect such as residual crack, thermally affected layer of the like on the surface.

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patent: 4751779 (1988-06-01), Nagatomo et al.
patent: 4767495 (1988-08-01), Nishioka
patent: 4772368 (1988-09-01), Rabian

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