Process for planarizing a substrate

Details Process for planarizing a substrate Process for planarizing a substrate

1985-07-25

1986-09-16

Page, Thurman K.

Coating processes

Electrical product produced

Condenser or capacitor

4273855, 4284735, B05D 512, B05D 302

Patent

active

046122109

ABSTRACT:
A surface coating of high glass temperature and superior mechanical properties along with excellent planarization and gap filling is used to coat substrates. The coating comprises a polyamide alkyl ester from a pyromellitic alkyl diester and a para-linked aromatic diamine dissolved in a solvent containing at least 10% of a co-solvent boiling above 220.degree. C.

REFERENCES:
patent: 3882085 (1975-05-01), Schmitt et al.
patent: 4347286 (1982-08-01), Ishizuka et al.
patent: 4467000 (1984-08-01), Economy et al.
patent: 4503285 (1985-03-01), Darms et al.
patent: 4515828 (1985-05-01), Economy et al.
patent: 4522880 (1985-06-01), Klostermeier et al.
patent: 4528004 (1985-07-01), Makino et al.
patent: 4533574 (1985-08-01), Fryd et al.

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