Coating processes – Direct application of electrical – magnetic – wave – or... – Photoinitiated chemical vapor deposition
Patent
1994-11-28
1996-04-23
Padgett, Marianne
Coating processes
Direct application of electrical, magnetic, wave, or...
Photoinitiated chemical vapor deposition
427553, 216 66, C23C 1648, B05D 300
Patent
active
055101585
ABSTRACT:
An oxidation process for an article to be treated in which, by generating ozone with a high concentration, a high treatment rate is achieved. In particular, an oxygen-containing fluid is irradiated with a vacuum ultraviolet rays emitted from a dielectric barrier discharge lamp in which xenon gas is encapsulated, producing a photochemical reaction from which ozone and an activated oxygen result. By causing this ozone and activated oxygen to contact the surface of the article to be treated, the surface of the article is oxidized. An even higher treatment rate can be achieved by generating the activated oxygen with the simultaneous use of a far ultraviolet ray source, thereby increasing the activity of the activated oxygen. Advantageously, the oxidation of the article to be treated with the vacuum ultraviolet rays and far ultraviolet rays is performed in accordance with the relationship:
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Hiramoto Tatsumi
Igarashi Tatsushi
Iso Shinichi
Matsuno Hiromitsu
Matsushima Takeo
Padgett Marianne
Safran David S.
Ushiodenki Kabushiki Kaisha
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