Process for modifying surfaces of nitride, and nitride having su

Details Process for modifying surfaces of nitride, and nitride having su Process for modifying surfaces of nitride, and nitride having su

1997-04-18

2000-12-19

Padgett, Marianne

Coating processes

Direct application of electrical, magnetic, wave, or...

Ion plating or implantation

427530, 427533, 20419217, C23C 1408, C23C 1406, H05H 100

Patent

active

061625124

ABSTRACT:
A process for modifying a nitride surface includes irradiating energized ion particles onto the nitride surface while blowing a reactive gas directly on the nitride surface under a vacuum condition. An aluminum nitride for a direct bond copper (DBC) can be obtained by forming a thin copper film on the thusly modified nitride.

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