Process for metals removal using beta-diketone or beta-ketoimine

Details Process for metals removal using beta-diketone or beta-ketoimine Process for metals removal using beta-diketone or beta-ketoimine

1996-01-11

1998-07-21

Warden, Jill

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

134 1, 134 26, B08B 700

Patent

active

057829861

ABSTRACT:
UV irradiation enhances oxidation of metal and/or formation of sublimable ligand compounds using beta-diketone or beta-ketoimine ligand forming compounds. A UV/halogen gas or UV/ozone treatment can be used to efficiently oxidize the metallic material to a suitable form for reaction with the ligand forming compound and UV irradiation can be used during exposure to the ligand forming compound to enhance the formation of sublimable ligand compounds. Oxidization and ligand compound formation can be run sequentially or simultaneously. The process can be used for bulk metals removal, metal film patterning or trace metals removal.

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