Process for metal nitride deposition

Details Process for metal nitride deposition Process for metal nitride deposition

1987-07-06

1989-05-23

Childs, Sadie

Coating processes

Coating by vapor, gas, or smoke

427255, C23C 1634

Patent

active

048329860

ABSTRACT:
A method for forming metal nitride films is provided comprising employing the techniques of chemical vapor deposition to thermally decompose a vapor comprising a dialkyl(Group III metal) azide, so as to deposit a film of the corresponding metal nitride on the surface of a substrate.

REFERENCES:
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patent: 4446242 (1984-05-01), Holt
patent: 4459363 (1984-07-01), Holt
L. E. Toth, in "Transition Metal Carbides and Nitrides," Academic Press, NY (1971).
L. V. Interrante et al., Mats. Res. Soc. Symp. Proc., 73, 359 (1986).
M. I. Prince, J. Organomet. Chem., 5, 584 (1966).
I. Haiduc et al., Basic Organometallic Chem., de Gruyter, Berlin (1985) at pp. 97-107.
McGraw-Hill Dictionary of Scientific and Technical Terms, D. N. Lapides, ed., McGraw-Hill Book Co., NY (1974) at p. 947.

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