Process for manufacturing thermal ink jet printhead and integrat

Details Process for manufacturing thermal ink jet printhead and integrat Process for manufacturing thermal ink jet printhead and integrat

1986-08-28

1989-08-29

Pellinen, A. D.

Recorders

Markers and/or driving means therefor

With ink supply to marker

29620, 219216, 338309, 338314, 346 76PH, G01D 1516

Patent

active

048621978

ABSTRACT:
A new and improved thermal ink jet printhead and fabrication process therefor are described. In one embodiment of this invention, heater resistors are formed on one area of an insulating substrate and relative large area electrical contacts are formed on an adjacent area of the insulating substrate. A barrier layer is formed over the conductive trace pattern defining the heater resistors on the one area, and a small via in this layer provides an electrical path between the large area electrical contacts and the conductive trace pattern, and thus provides a current drive path for the heater resistors. The small via provides minimum exposure of the barrier sidewall area and area of the conductive trace pattern and thus improves device reliability and fabrication yields and also improves electrical contact to the printhead.
Alternatively, the barrier layer may be made less than laterally coextensive with the conductive trace material to thereby leave a small area of the trace material available for metal overlay connection to the large area contact pad which is formed to the side of the conductive trace material.

REFERENCES:
patent: 4617575 (1986-10-01), Fuyama et al.

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