Process for manufacturing layers of diamond doped with boron

Details Process for manufacturing layers of diamond doped with boron Process for manufacturing layers of diamond doped with boron

1995-10-02

1997-01-07

King, Roy V.

Coating processes

Coating by vapor, gas, or smoke

Carbon or carbide coating

4272552, 427577, C23C 1600, B05D 306

Patent

active

055914845

ABSTRACT:
The present invention concerns a process for manufacturing conductive diamond layers, in particular layers of diamond doped with boron which are obtained by chemical vapour deposition (CVD).
The process of the invention consists of forming a layer of diamond doped with boron using amino-borane compounds.
These boron compounds are of particular interest since they are non-toxic and easy to manipulate.

REFERENCES:
patent: 4740263 (1988-04-01), Imai et al.
Murakana et al, "Cathodoluminescence Properties of Diamond Films Synthesized by Microwave Plasma Assisted CVD", Apr. 15, 1991, No. 2, pp. 299-311.

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