Process for manufacturing high-density MOS-technology power devi

Details Process for manufacturing high-density MOS-technology power devi Process for manufacturing high-density MOS-technology power devi

1995-06-30

1997-09-23

Bowers, Jr., Charles L.

Fishing, trapping, and vermin destroying

437 40, 437 41, 437 35, 437 44, 148DIG126, H01L 21265

Patent

active

056703929

ABSTRACT:
A process for manufacturing high-density MOS-technology power devices includes the steps of: forming a conductive insulated gate layer on a surface of a lightly doped semiconductor material layer of a first conductivity type; forming an insulating material layer over the insulated gate layer; selectively removing the insulating material layer and the underlying insulated gate layer to form a plurality of elongated windows having two elongated edges and two short edges, delimiting respective uncovered surface stripes of the semiconductor material layer; implanting a high dose of a first dopant of the first conductivity type along two directions which lie in a plane transversal to said elongated windows and orthogonal to the semiconductor material layer surface, and which are substantially symmetrically tilted at a first prescribed angle with respect to a direction orthogonal to the semiconductor material layer surface, the first angle depending on the overall thickness of the insulated gate layer and of the insulating material layer to prevent the first dopant from being implanted in a central stripe of the uncovered surface stripes, to form pairs of heavily doped elongated source regions of the first conductivity type which extend along the two elongated edges of each elongated window and which are separated by the central stripe; implanting a low dose of a second dopant of a second conductivity type along two directions which lie in the plane, and which are substantially symmetrically tilted of a second prescribed angle with respect to the orthogonal direction, to form doped regions of the second conductivity type each comprising two lightly doped elongated channel regions extending under the two elongated edges of each elongated window; implanting a high dose of a third dopant of the second conductivity type substantially along the orthogonal direction, the insulating material layer acting as a mask, to form heavily doped regions substantially aligned with the edges of the elongated windows.

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