Process for manufacturing diamond-like thin film

Details Process for manufacturing diamond-like thin film Process for manufacturing diamond-like thin film

1990-06-29

1993-02-09

Nguyen, Nam X.

Coating processes

Direct application of electrical, magnetic, wave, or...

Ion plating or implantation

20419238, 427577, C23C 1650

Patent

active

051850672

ABSTRACT:
A diamond-like thin film formed on a substrate, with the peripheral region tapered toward the edge, satisfying the dimensional relation

REFERENCES:
patent: 4315960 (1982-02-01), Ohji et al.
patent: 4428809 (1984-01-01), Heimbach et al.
patent: 4486286 (1984-12-01), Lewin et al.
patent: 4548698 (1985-10-01), Sellschopp
patent: 4902572 (1990-02-01), Horne et al.
patent: 4981568 (1991-01-01), Taranko et al.
"Diamondlike Carbon Films Prepared by Charged Particles", Y. Namba, Hyomen Kagaku, vol. 5, No. 108, pp. 108-115 (1984).

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