Coating processes – Measuring – testing – or indicating – Thickness or uniformity of thickness determined
Patent
1990-10-18
1992-09-29
Pianalto, Bernard
Coating processes
Measuring, testing, or indicating
Thickness or uniformity of thickness determined
427162, 427240, 427299, 427402, B05D 506
Patent
active
051512955
ABSTRACT:
A method of depositing the layers of an optical recording medium to their requisite thicknesses is disclosed in which optical monitoring of the reflectivity of a first dielectric layer during deposition is used to determine the deposition rate. The reflectivity is monitored to determine the time period in which the reflectivity reaches a maximum or minimum value, which occurs when the layer is a quarter wave thick. The deposition rate is derived from that time period, and the deposition is continued for a time in accordance with the deposition rate until the requisite thickness of the first dielectric layer is obtained. The second dielectric layer is deposited for a lesser time period in accordance with the deposition rate which has been optically derived during deposition of the first dielectric layer.
REFERENCES:
patent: 3492491 (1970-12-01), Beeh
patent: 3773548 (1973-11-01), Baker et al.
patent: 4457794 (1984-06-01), Kotera et al.
patent: 4676646 (1990-06-01), Strand et al.
Optical Interference Method For The Approximate Determination Of Refractive Index And Thickness Of A Transparent Layer by Alvin M. Goodman, published in the Sep. 1, 1978 issue of Applied Optics.
Thickness Measurements Of Film On Transparent Substrates By Photoelectric Detection Of Interference Fringes by Pierce and Venard, published in the reviews of Scientific Instruments, vol. 45, No. 1, Jan. 1974.
Horai Keiichiro
Kawahara Katsumi
Ohta Takeo
Uchida Masami
Yoshioka Kazumi
Matsushita Electric - Industrial Co., Ltd.
Pianalto Bernard
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