Process for manufacturing an evaporation source

Details Process for manufacturing an evaporation source Process for manufacturing an evaporation source

2005-06-21

2005-06-21

Jenkins, Daniel (Department: 1742)

Powder metallurgy processes

Powder metallurgy processes with heating or sintering

Making composite or hollow article

C419S038000, C419S041000

Reexamination Certificate

active

06908588

ABSTRACT:
The invention relates to a process for manufacturing an evaporation source for physical vapor deposition. The evaporation source is formed of the actual sputtering target with an aluminum component and one or more further components as well as of a backing plate made from a material having better thermal conductivity than the target. The backing plate made of a powdery starting material is pressed, together with the powdery components of the sputtering target, into sandwiched powder fractions and then formed.

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