Process for manufacturing a triaxial piezoresistive...

Details Process for manufacturing a triaxial piezoresistive... Process for manufacturing a triaxial piezoresistive...

2008-01-29

2008-01-29

Allen, Andre J. (Department: 2855)

Measuring and testing

Speed, velocity, or acceleration

C073S146000, C340S974000

Reexamination Certificate

active

07322236

ABSTRACT:
A manufacturing process of a semiconductor piezoresistive accelerometer includes the steps of: providing a wafer of semiconductor material; providing a membrane in the wafer over a cavity; rigidly coupling an inertial mass to the membrane; and providing, in the wafer, piezoresistive transduction elements, that are sensitive to strains of the membrane and generate corresponding electrical signals. The step of coupling is carried out by forming the inertial mass on top of a surface of the membrane opposite to the cavity. The accelerometer is advantageously used in a device for monitoring the pressure of a tire of a vehicle.

REFERENCES:
patent: 5352635 (1994-10-01), Tu et al.
patent: 5563344 (1996-10-01), Kaiser et al.
patent: 5567880 (1996-10-01), Yokota et al.
patent: 5905044 (1999-05-01), Lee et al.
patent: 6581465 (2003-06-01), Waters et al.
patent: 6763718 (2004-07-01), Waters et al.
patent: 6853315 (2005-02-01), Schiller et al.
patent: 102 50 358 (2004-05-01), None

Affiliated with

Also associated with

Rating

Process for manufacturing a triaxial piezoresistive... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for manufacturing a triaxial piezoresistive..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for manufacturing a triaxial piezoresistive... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2806633