Process for manufacturing a sensor

Details Process for manufacturing a sensor Process for manufacturing a sensor

1996-02-12

1998-03-03

Nguyen, Tuan H.

Fishing, trapping, and vermin destroying

437901, 437921, 437927, 437228, 148DIG159, 148DIG135, H01L 2170

Patent

active

057233535

ABSTRACT:
An acceleration sensor is composed of a three-layer system. The acceleration sensor and conductor tracks are patterned out of the third layer. The conductor tracks are electrically isolated from other regions of the third layer by recesses and electrically insulated from a first layer by a second electrically insulating layer. In this manner, a simple electrical contacting is achieved, which is configured out of a three-layer system.

REFERENCES:
patent: 5395802 (1995-03-01), Kiyota
patent: 5510276 (1996-04-01), Diem et al.
patent: 5576250 (1996-11-01), Diem et al.

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