Process for manufacturing a regulation and protection diode

Details Process for manufacturing a regulation and protection diode Process for manufacturing a regulation and protection diode

1989-09-08

1991-07-16

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437904, 148DIG174, H01L 21265

Patent

active

050325345

ABSTRACT:
A process for manufacturing a combination and protection diode on a substrate comprising a first, highly doped, thick N-type layer (40) and a second N-type, low doped, layer (10), comprises the following successive steps: implanting in a small surface area N-type dopants (12), carrying out a first annealing process, implanting in a second area including and surrounding the first area N-type dopants (22), carrying out a second annealing process, inplanting in a third area including the first area and at least one portion of the second area P-type dopants (32), and carrying out a third annealing process.

REFERENCES:
patent: 4118251 (1978-10-01), Murrmann et al.
patent: 4177095 (1979-12-01), Nelson
patent: 4717678 (1988-01-01), Goth
patent: 4771011 (1988-09-01), Hemmah et al.

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