Process for manufacturing a REFET or a CHEMFET, and the manufact

Details Process for manufacturing a REFET or a CHEMFET, and the manufact Process for manufacturing a REFET or a CHEMFET, and the manufact

1987-09-04

1989-11-21

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437235, 204418, 357 25, G01N 2700, H01L 2928

Patent

active

048822922

ABSTRACT:
The invention relates to a process for manufacturing a REFET and/or CHEMFET, comprising: (a) covalent bonding of a hydrophilic polymer layer to an isolator layer applied to a semiconductor material; (b) the absorption of water or a watery solution into said hydrophilic polymer layer; and (c) the binding of a hydrophobic polymer layer to the water holding hydrophilic polymer layer. It is advantageous that this water holding hydrophilic polymer layer also contains an electrolyte and/or a buffer.
Preferably an ion to be measured with the CHEMFET also forms part of the electrolyte.

REFERENCES:
patent: 4269682 (1981-05-01), Yano et al.
patent: 4305802 (1981-12-01), Koshiishi
patent: 4490216 (1984-12-01), McConnell
patent: 4650547 (1987-03-01), Gough
patent: 4816118 (1989-03-01), Oyama et al.

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