Chemistry: molecular biology and microbiology – Apparatus – Including measuring or testing
Reexamination Certificate
2005-07-28
2008-11-18
Griffin, Walter D. (Department: 1797)
Chemistry: molecular biology and microbiology
Apparatus
Including measuring or testing
C435S006120, C435S091200, C435S287200, C435S303100
Reexamination Certificate
active
07452713
ABSTRACT:
A process for manufacturing a microfluidic device, including the steps of: forming at least one channel in a semiconductor material body; forming a dielectric diaphragm above the channel, for closing the channel; and forming heating elements for providing thermal energy inside the channel. The heating elements are formed directly on said dielectric diaphragm.
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Barlocchi Gabriele
Corona Pietro
Mastromatteo Ubaldo
Villa Flavio
Baker & McKenzie LLP
Doe Shanta G
Griffin Walter D.
STMicroelectronics S.r.l.
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