Process for manufacturing a magnetic head coil structure

Details Process for manufacturing a magnetic head coil structure Process for manufacturing a magnetic head coil structure

2005-06-07

2005-06-07

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603230, C029S606000, C216S039000, C216S047000, C360S123090, C336S200000

Reexamination Certificate

active

06901653

ABSTRACT:
A Damascene process is provided for manufacturing a coil structure for a magnetic head. During the manufacturing process, an insulating layer is initially deposited after which a photoresist layer is deposited. A silicon dielectric layer is then deposited on the photoresist layer. After masking the silicon dielectric layer, at least one channel is etched in the photoresist layer and the silicon dielectric layer. Then, a conductive seed layer is deposited in the at least one channel. The at least one channel is then ready to be filled with a conductive material and chemically/mechanically polished to define a coil structure.

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